Colibrys MS9000惯性MEMS方案

Colibrys 公司的MS9000是特别小型高端的加速度计,特别适用于惯性检测,倾斜检测和震动检测. MS9000是MEMS容性传感器,采用硅元件,集成了用于信号调理的低功耗ASIC,用来存储补偿值的微控制器和温度传感器.满刻度为+/-2g到+/-250g,采用低功耗模拟电压输出.本文介绍了MS9000的主要特性,方框图以及评估板电路连接图和评估板材料清单(BOM).

Colibrys MS9000 accelerometer is a new extra small high end product dedicated to applications in the domains of inertial sensing. The robust and low power design combined with an excellent bias stability guarantee the superior reliability of the MS9000 MEMS accelerometer.
The Colibrys MS9000 accelerometer is a MEMS capacitive sensor, based upon a bulk micro-machined silicon element, a low power ASIC for signal conditioning, a micro-controller for storage of compensation values and a temperature sensor. The product is low power, calibrated, robust and stable and the electronic configuration provides a solid power on reset and ensures a full protection against brown-out.

Long-term stability of bias and scale factor are expected to be less than 0.1% of full-scale range. For the future ±2g version (MS9002.D), typical bias temperature coefficient will be smaller than 100 mg/°C and scale factor temperature coefficients smaller than 100 ppm/°C.

MS9000主要特性:





图1. MS9000方框图
MS9000主要应用:
Inertial sensing
Tilt Sensing
Vibration Sensing
The Evaluation Board EVBA version offers to the user a simple and quick means to evaluate the main functionality and a full performance of the Colibrys MS9000 and VS9000 accelerometer series.
The MS9000 product is a MEMS capacitive accelerometer based on a bulk micro-machined silicon element, a low power ASIC for signal conditioning, a micro-controller for storage of compensation values and a temperature sensor



图2.MS9000评估板外形图
This small Evaluation Board circuit is intended to help the system designer or qualification engineer to speed-up the evaluation and integration of the MS/VS9000 accelerometer series to any new or upgraded systems. It is simple to use and as no additional components are required, it can easily be connected to a power supply and a voltmeter to read the accelerometer output and temperature signal through the 6-pin connector.



图3.MS9000评估板电路连接图
评估板材料清单(BOM):